About: http://webisa.webdatacommons.org/119974260

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	By doping an impurity such as carbon or nitride in the silicon substrate 1 ahead of time, heat treatment using a high intensity light source may be performed without damaging the silicon substrate 1.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com