About: http://webisa.webdatacommons.org/120120614

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	techniques such as chemical or physical vapor deposition and top-down processes such
http://www.w3.org/ns/prov#wasQuotedFrom	opticsinfobase.org