About: http://webisa.webdatacommons.org/120131474

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	It is preferable that base pretreatment 203 is performed since it is a treatment that is particularly effective in the case of forming a microcrystalline silicon film.
http://www.w3.org/ns/prov#wasQuotedFrom	freshpatents.com