About: http://webisa.webdatacommons.org/120183283

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Other materials such as titanium Ti or silicon oxide may be used as long as the material can be used to form high dielectric films by low-temperature anodic oxidation.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com