About: http://webisa.webdatacommons.org/120329007

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As shown in FIG. 15, a mask layer 170 made of a material such as polyimide is formed.
http://www.w3.org/ns/prov#wasQuotedFrom	google.co.uk