About: http://webisa.webdatacommons.org/120346942

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A substrate processing apparatus according to claim 3, wherein the filter is a chemical filter for catching the metallic contaminating material in the treatment liquid.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es