About: http://webisa.webdatacommons.org/120506417

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	An insulative ring 422 made of a dielectric material, such as a ceramic, is typically positioned around the outer perimeter of the electrostatic chuck 420 to prevent arcing between the electrostatic chuck and the grounded chamber walls.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com