About: http://webisa.webdatacommons.org/12058274

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	An electrically programmable antifuse structure according to claim 3 wherein said layer of a highly electrically conductive material is a material selected from the group consisting of: TiN, Ti, TiW, W, Cu, AlCu.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com