About: http://webisa.webdatacommons.org/120691326

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In another principal aspect, the present invention is a method of adjusting the resonant frequency of a MEMS resonator having a first resonant frequency.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com