About: http://webisa.webdatacommons.org/120831536

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In preferred form, this gate insulator (or separator) 84 is preferably silicon dioxide (SiO2), although other oxides or dielectrics may also be used including lanthanum oxide, hafnium oxide, oxynitride (ONO), or silicon nitride (Si3N4).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com