About: http://webisa.webdatacommons.org/12114985

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Insulating layer 106 may be any insulating layer, such as silicon oxide, silicon nitride, silicon oxynitride, doped silicon oxide (i.e., BPSG or fluorine doped silicon oxide) or a combination of the above layers.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com