About: http://webisa.webdatacommons.org/12123596

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In addition, since impurities such as phosphorous are not mixed in the inorganic SOG film, the etch back process is not required.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com