About: http://webisa.webdatacommons.org/121258617

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	By loading the stored alignment data, continuous automatic inspection of the respective types of wafers can be performed.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com