| http://www.w3.org/ns/prov#value | - Preferably (but not obligatorily), the first substrate layer 12 is made from a material such as silicon, Pyrex??? or another suitable material that is amenable to machining using standard lithography methods known in the art (such as, for example, the forming of the recesses 16 in the first substrate layer 12 using conventional masking, photoresist application and etching methods, and the like).
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