About: http://webisa.webdatacommons.org/121991377

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In another embodiment, the thickness of the substrate is less than 50 ??m, such as 5 to 10 ??m.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com