About Web is a LOD

About: http://webisa.webdatacommons.org/122034060

PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • In the preferred embodiment, the only MEMS materials are PECVD glass, sputtered TiN, and a sacrificial material (which may be polyimide, PSG, BPSG, aluminum, or other materials).
http://www.w3.org/ns/prov#wasQuotedFrom
  • google.fr