About: http://webisa.webdatacommons.org/122087834

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Incidentally, FIG. 3 is a plan view showing a quartz wafer according to the present embodiment.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com