About: http://webisa.webdatacommons.org/122151706

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	An advantage of the present invention is an efficient cost-effective method of manufacturing a semiconductor device with accurately formed conductive gates and gate oxide layers.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com