About: http://webisa.webdatacommons.org/122154740

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In this case, the adhesion promoting or enhancing layer (e.g., HMDS or other photoresist adhesion promoter) can be deposited directly on the relatively thin passivation layer 52.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com