About: http://webisa.webdatacommons.org/122239074

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In an aspect of the present invention, one of the at least one insulating layer is formed on a surface of the piezoelectric stack structure at the opposite side to the substrate.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com