About: http://webisa.webdatacommons.org/12229280

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	An example preferred method of forming material 22 over substrate 10 isby chemical vapor deposition to completely fill opening 20, followed by a planarization technique, for example chemical mechanical polishing.
http://www.w3.org/ns/prov#wasQuotedFrom	patentgenius.com