PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • Wafer susceptors 168 are held in place via threaded rod 170 and conductive spacers 172, 174, and 176 made from suitable material such as metal or graphite.
http://www.w3.org/ns/prov#wasQuotedFrom
  • freepatentsonline.com