About: http://webisa.webdatacommons.org/122373392

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Wafer susceptors 168 are held in place via threaded rod 170 and conductive spacers 172, 174, and 176 made from suitable material such as metal or graphite.
http://www.w3.org/ns/prov#wasQuotedFrom	freepatentsonline.com