About: http://webisa.webdatacommons.org/122740111

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 29A and FIG. 29B are a plan view and a cross sectional view showing a phase shift mask according to an eighteenth embodiment of the present invention;
http://www.w3.org/ns/prov#wasQuotedFrom	google.com