About: http://webisa.webdatacommons.org/12284243

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	On account of the greater simplicity of the technique, however, there is a tendency to use so-called diode sputtering insofar as possible, along with a magnetic field enhancement of the sputtering process in some
http://www.w3.org/ns/prov#wasQuotedFrom	patents.com