About: http://webisa.webdatacommons.org/122870062

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A plasma treatment using a gas that contains hydrogen such as H2 and NH3 may be performed precedent to formation of the film and heat treatment may be performed after the film formation.
http://www.w3.org/ns/prov#wasQuotedFrom	google.co.uk