About: http://webisa.webdatacommons.org/123079679

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As the insulating film 50501, a single layer of an insulating film such as a silicon oxide film, a silicon nitride film, or a silicon oxynitride film (SiOxNy), or a stacked layer including at least two of these films is used.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au