About: http://webisa.webdatacommons.org/123166733

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A source/drain implantation with e.g. arsenic is subsequently carried out at an energy of e.g. 25 keV and a dose of for example 5???1015 cm-2.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com