| http://www.w3.org/ns/prov#value | - Usually, it is made of electrically and sometimes magnetically conductive material e.g. mu-metal to shield the interior of the optical column from disturbing electric and/or magnetic fields. [0013] According to a further aspect of the present invention, the housing comprises a valve, deflection units, detectors, or other parts and components which are arranged in the vicinity of the beam path.
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