About: http://webisa.webdatacommons.org/12319382

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In the meanwhile, the etching barrier material 17 may be either an insulating film or a conductive material such as silicon film.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es