About: http://webisa.webdatacommons.org/12319915

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In an example case, the tool can be a nickel foil with a relief pattern which is created by a technique such as photolithography.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au