About: http://webisa.webdatacommons.org/123273855

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As shown in FIG. 4C, a sacrificial film 105 made of a metal such as Ta is deposited on the upper surface of the phase transition material film 103.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com