About: http://webisa.webdatacommons.org/123301550

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As shown in FIG. 2, wafer 42 comprises a silicon substrate 72 and three layers 74, 76 and 78, where one or more of the layers may comprise a material such as silicon dioxide, and other layer or layers may comprise silicon nitride.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com