| http://www.w3.org/ns/prov#value | - As seen in FIG. 3D, etched channels 32 are preferably coated with a dielectric material, such as epoxy, silicon oxide, silicon dioxide, solder mask, or any other suitable dielectric material, such as silicon nitride, silicon oxinitride, polyimide, BCB.TM., parylene, polynaphthalenes, fluorocarbons or accrylates.
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