About: http://webisa.webdatacommons.org/123459189

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A material forming the first grating 6 located nearest to the substrate is composed of TiO2, grating period ??1 is set to 0.15 ??m, grating depth d1 is set to 1.85 ??m, and filling factor FF1 (=w1/??1) is set to 0.90.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com