About: http://webisa.webdatacommons.org/12358096

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In this embodiment, the pressure in the reaction chamber is reduced to less than 10???5 Pa, thereby effectively preventing an atmospheric component such as oxygen from entering the crystalline semiconductor film.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com