About: http://webisa.webdatacommons.org/12371684

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In the optical head assembly thus fabricated, collimator lens 5, beam splitter 6, converging grating coupler 7 and photo detector 9 are formed by such method as photolithography, electron beam drawing or etching.
http://www.w3.org/ns/prov#wasQuotedFrom	google.co.uk