About: http://webisa.webdatacommons.org/124065387

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Laterally spaced from and adjacent to polysilicon 14 are sidewall spacers 16 which, inter alia, help to prevent problems such as "short channel effects" and hot carrier injection.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com