About: http://webisa.webdatacommons.org/124604393

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A ball bumping machine, according to claim 1, characterized in that: the substrate is a semiconductor wafer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com