About: http://webisa.webdatacommons.org/124688238

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Again, the shape and size of the sleeve 12 is a design choice depending on the shape of the substrate to be processed, but generally the shape is cylindrical to provide a containment wall to conform to the shape of a circular wafer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au