About: http://webisa.webdatacommons.org/125695503

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Note that another reactive gas such as CF4 or ClF3 may be used. [0189] Then, the reactive gas is decomposed by the ??-wave in the plasma discharge tube 933 to produce a radical.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com