| http://www.w3.org/ns/prov#value | - Moreover, the x-sensors or y-sensors in one corner are aligned with z-sensors in another corner, so that when for instance a crossing line in the x-direction is crossed by the substrate table a maximum of two sensors crosses this line at the same time, whereby one of the sensors is a x-sensor or a y-sensor and the other sensor is a z-sensor.
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