About: http://webisa.webdatacommons.org/125862437

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A suitable silane flow rate for forming tensile-stressed silicon nitride film may be, for example a flow rate of less than about 100 sccm, such as from about 100 to about 25 sccm.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au