About: http://webisa.webdatacommons.org/125924717

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	ses, for example, a recovery unit 4 including a vacuum pump for recovering the purge gas containing impurities, an accumulating unit 6 for accumulating the high purity purge gas,
http://www.w3.org/ns/prov#wasQuotedFrom	google.com