About: http://webisa.webdatacommons.org/126138937

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 3 is a simplified flow chart illustrating an exemplary method for forming a silicon oxide film over a substrate.
http://www.w3.org/ns/prov#wasQuotedFrom	archpatent.com