About: http://webisa.webdatacommons.org/12621950

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Electrode material, such as TiN, TaN, W, Al, Cu, TiSiN, TaSiN, or other suitable electrode material, is deposited over the phase-change material layer to provide a second electrode material layer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com