About: http://webisa.webdatacommons.org/126319209

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 5 is a drawing illustrating a case where a flow sensor was formed by using an air bridge formed in Embodiment 1;
http://www.w3.org/ns/prov#wasQuotedFrom	google.com