About: http://webisa.webdatacommons.org/126573727

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Moreover, for scanning a two dimensional substrate surface, an expensive image scanner should be required. [0011] As another method, there is an optical analysis by using a waveguide.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com