About: http://webisa.webdatacommons.org/126633991

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	For example, a silane gas such as TEOS may be fed into at least one burner in order to cause a layer of silicon oxide 3 to be deposited on a glass substrate 1 at atmospheric pressure.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr