About: http://webisa.webdatacommons.org/126827588

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	However, by setting a proper dry etching condition, a similar effect can be achieved using a gas such as CF4, C2F6, or CHF3, or a mixture gas thereof with He, H2, N2, Ar, C2H4, or O2.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com