About: http://webisa.webdatacommons.org/126910062

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Component 109 is a compensator, such as a tiltable mirror or wedge-like transmissive optical element for compensating for telecentricity errors of the illumination optical system 102.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com